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XM(fi)c(din)Xģ߀ܻXģXϽģ壨Xģǽ(li)XM(fi)ğc(din)I(lng)ʩblʵ؏(f)ʹܵf(wn)̹@һĚgӭ(j)Ї(gu)ɫمf(xi)(hu)y(tng)Ӌ(j)(sh)(j)@ʾĿǰ(gu)(ni)Xģ呪(yng)ñռѸ_(d)17%l(f)չOѸXӹI(y)ӿXģИI(y) Xģă(yu)(sh)Ҫڃɂ(g)һʩڶXϽģϵy(tng)ǡģϵy(tng)һģʩ_(d)һ(ji)sнλĹɱľģģӹbͲǘO(f)sͺM(fi)r(sh)g^(gu)̣I(y)(bio)(zhn)̶ȵʹʩyȡr(sh)gM(fi)�ʩHнλ(ji)sɱҲǷخa(chn)I(y)D(zhun)ٽػ\YP(gun)I(yu)(sh)֮һ ƽʹóɱ͡XģmȻλeɱ؏(f)ʹõƽɱ(bo)U֮߀һĻՃr(ji)ֵľģ߀ǺЃ(yu)(sh)ǰژ(bio)(zhn)ӽѭh(hun)ʹá҂ѼP(gun)оXģֱُ(gu)I(mi)һ(xing)ĿD(zhun)ʹ60ڳɱܳƽģ壨Ӌ(j)Xģ嚈ֵUʹtD(zhun)~80βcľģM(fi)óƽ (sh)(j)(li)ԴW(wng)j(lu) ߌӽБ(yng)XϽģҪژ(bio)(zhn)ͨüXģʹóɱЃ(yu)(sh)ΗȫwF(xin)Xģă(yu)(sh)Ƕߌ(bio)(zhn)ߵĽ؏(f)(yng)@ζXϽģ呪(yng)סլkǵI(lng)mȶԳЌW(xu)УD(sh)^t(y)ԺȘOO(sh)Ӌ(j)L(fng)Ĵ͘(bio)־Խ(yng)ÿg Xģ(j)2016Ї(gu)_(ki)סլk12.2|ƽУXģ尴Ց(yng)ñ17%50%rЇ(gu)XģN؏(f)ʹôΔ(sh)Xģa(chn)Ӌ(j)l(f)F(xin)Ҫ(sh)F(xin)200-300ε؏(f)ʹôΔ(sh)(g)Ї(gu)ÿXģH費30f(wn)ԝM150ҵĽ(jng)(j)Ч߅(gu)(ni)H39f(wn)Xģ塣 (sh)(j)(li)Դ�ALD (dng)ǰ(gu)(ni)Xģa(chn)I(y)Ї(gu)⣬(sh)I(y)a(chn)20-50f(wn)ƽ֮ga(chn)](mi)һͻ1f(wn)Ї(gu)Xģa(chn)ܸ_(d)900f(wn)ƽSXģ峬ë̼{(gu)(ni)Xģa(chn)Ĵ͔DC(j)b䣬ѸռI(lng)XģЈ(chng)(j)Ї(gu)(bo)@ʾ2016-2017Ӌ(j)a(chn)Xģ峬33f(wn)յļa(chn)7f(wn)Ӌ(j)a(chn)Xģ40f(wn)҂Ӌ(j)(g)XģЈ(chng)Xģ(yng)ԓ50f(wn)Ј(chng)Ӌ(j)@ζXģЈ(chng)(jng)^(gu)ıl(f)ʽL(zhng)M(jn)һ(g)߶ȴl(f)չ;Փδ(li)Ŀg ҂һ50λMؓ(f)ʹôΔ(sh)Ӌ(j)250ʹӋ(j)XģҪ5꣬50f(wn)Ј(chng)Xģ(bo)U£10f(wn)ĿǰЈ(chng)ͨXģ呪(yng)lȵͣh(yun)(bo)UAδ(li)SXģM(jn)(du)XM(fi)Ӱ푁(li)20-30f(wn)XM(fi)c(din)Ѹs |